显影蚀刻连退膜机

设备主要特点/Features：
1、透明玻璃设计便于观察生产情况
Transparent glass is adopted for convenient observing the producing status.
2、蚀刻线宽线距：2mil/2mil，蚀刻均匀度C.O.V≥92%,蚀刻因子≥5
Etching Line Width/Distance:2mil/2mil, Etching Evenness C.O.V≥92%, Etching Gene≥5
3、精密补偿蚀刻设计，有效控制水池效应，提高做板均匀性
Precision compensation etching design that it is effective to control the puddle effect and improve the evenness of
the panel.
4、退膜采用喷淋系统、药液循环系统以及接渣系统独特设计，膜渣去除率达98%以上
Spraying system, medicine circulation system and unique design of dregs-collection system are used in film stripping
module to get the dreg removal rate up to 98 percent.
工艺流程/Schematic：
入板→显影→新液洗→冲污水→循环水洗→检查→补偿蚀刻→蚀刻→循环水洗→检查→退膜→冲污水→循环水洗→酸洗→
循环水洗→干板组合→出板
Input→Developing→Fresh Solution→Waste Wr→Circulation Wr/s→Inspection→Compensated Etching→Etching→Circulation
Wr/s→Inspection→Film Stripping→Waste Wr→Circulation Wr/s→Acid Rinse→Circulation Wr/s→Drying Module→Output

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